Microscopy software for automatic acquisition, inspection and metrology.

microscope with wafer

Automated Optical Inspection (AOI)

AUTOAIM is a software for automatic acquisition and analysis with classical or confocal microscopes. In addition to the standard features, it offers multiple benefits for the semiconductor industry: wafer maps, critical dimension analysis and easy automation without programming.

AUTOAIM allows the fast and reproducible measurement of geometries, including diameters and heights of vias and long holes. We developed our own image processing algorithms and can therefore easily adapt them to your custom structures.

AUTOAIM runs on various systems. Just ask us whether your system is already supported.

AUTOAIM Key Features

  • Streamlined workflow from hardware control to image acquisition and analysis in one single software tool.
  • Powerful and intuitive automation – no programming skills required. Automatic acquisition and analysis.
  • 2D and 3D geometric pattern recognition to measure critical dimensions of circular vias, long holes, overlays and more. Customized patterns can be developed for you. 
  • Generation of extended focus images by focus stacking.
  • Additional file import and export filters for wafer maps, defect position lists, image formats, etc., can be developed for you.
  • Automatic surface and profile characterization.
  • Statistical significance through an unlimited number of targets in each automatic recipe. Because the automatic image analysis runs simultaneously to the acquisition, the raw data does not have to be stored on the hard disk.
  • User and rights management.
  • Software autofocus – when using confocal microscopy our autofocus works even on perfect mirrors.
  • Smart hardware protection to prevent crashes between the objective lens and the sample.
  • Supported operating system: Windows XP, Windows Vista, Windows 7 und Windows 10.

AUTOAIM Highlights

  • Time-saving – Fast and intuitive automation.
  • Secure – Adaptive limits to protect your samples and objective lenses.
  • Reliable – Analysis with pattern recognition.

microscope software overview with automatic measurement

Tailored to Your Needs

Increase the benefit from your new or existing hardware through better, customized software.

AUTOAIM already supports a wide range of hardware and we can add support for almost any other hardware, including motorized stages, wafer handlers, etc. 

We can develop custom pattern recognition algorithms.

Customized file import and export filters for wafer maps, defect position lists and image formats help breaking down barriers between your multiple tools. 

Built with Experience

AUTOAIM was developed in cooperation with Fraunhofer IZM.

Complete Systems with Hardware

If you want to upgrade an existing system or buy a completely new one, we are happy to consult you. Do not hesitate to contact us.